1 / 5
| Parameter | Specification (MVS-5040) | |
| Code# | 523-380 | |
| X/Y-axis Travel | 500x400mm | |
| Z-axis Travel | 200mm | |
| X/Y/Z Linear Scale | Resolution: 0.0005mm | |
| Guidance Mode | Precision Linear Guide, Double-track Double Slider | |
| Accuracy (X/Y) | ≤3+L/200 (um) | |
| Accuracy (Z) | ≤4+L/200 (um) | |
| Repeatability | ±2um | |
| Video System | Camera | High Definition 1/3" Color CCD |
| Lens | 6.5X Motorized Coaxial Zoom (0.7X-4.5X) | |
| Illumination | Contour | LED Parallel Cold Illumination |
| Surface | Adjustable 5-ring 8-division LED | |
This system is widely used for dimension detection in production lines and laboratories across various industries:
Semiconductor Manufacturing
Precision Metal Processing
Precision Plastic
Technical Overview
| Standard Delivery | Code# | Optional Accessories | Code# |
| IM 4.0 Fully-auto Software | IM 4.0 | Imported MCP Touch Probe | 581-721 |
| Calibration Block | 581-801 | Imported Laser Sensor | 581-361 |
| Motion Controller | 526-111 | 3D Measuring Software | IM 4.2 |
| Imported 0.5um Linear Scale | 581-201 | 2X Auxiliary Objective | 423-050 |
| Joystick | 581-871 | 0.5X Auxiliary Objective | 423-050 |