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| Category | Parameter | FM-UVD3 Specification |
|---|---|---|
| Laser System | Wavelength | 355nm (Ultraviolet) |
| Power Output | >3W@40kHz (3~40W optional) | |
| Modulation Frequency | 10 ~ 200kHz | |
| Beam Quality (M2) | <1.2 | |
| Galvanometer | Scan Range | <15 * 15mm |
| Positioning Accuracy | ≤±3μm | |
| XY Workbench | Travel Journey | 300*300mm (600*600mm optional) |
| Repeatability | ≤±1μm | |
| Max Speed | ≤200mm/s | |
| Z-axis | Journey / Accuracy | 200mm / ≤±5μm |
| Monitoring | CCD Camera | 5 Megapixels / 10X Optical Magnification |
| Processing | Min Spot Size | 5 μm (10 μm optional) |
| Dimensions | Size & Weight | 1100*1700*1900mm / 1500kg |