Fsd Crystal Materials Femtosecond Laser Fabrication System Optical Component Grating Machining Laser Equipment

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Product Description

Basic Information

Model NO.
Lithography-003
Condition
New
Certification
CCC
Warranty
12 Months
Automatic Grade
Automatic
Installation
Vertical
Driven Type
Electric
Advantage
Factory Price
Product Name
Mpd Multi-Photon 3D Laser Direct-Write Photolithog
After-Sale Service
Provided
Support Print Height
≤10mm
Origin
China
Production Capacity
10000 Set Per Year

Packaging & Delivery

Package Size
1000.00cm * 1000.00cm * 1000.00cm
Package Gross Weight
19.000kg

Product Description

High-Precision Micro/Nano Photolithography Solutions

FSD Crystal Materials Femtosecond Laser Fabrication System

FSD Fabrication System
Product Overview: The FSD Series specializes in high-precision femtosecond laser machining of various hard-brittle materials. Equipped with advanced energy modulation and vector-path full-speed processing technology, it excels in shaping complex 2D and 3D surface or internal structures with exceptional accuracy.
Key Applications: Crystal materials processing, hard-brittle materials fabrication, micro-lens arrays, conical arrays, blazed gratings, aerospace components, and precision optical parts.
Core Specifications: 6W/10W/20W Average Power, Pulse Width < 300 fs, Travel 200mm x 200mm x 20mm, Positioning Accuracy ≤ 300 nm.

This equipment enables maskless direct exposure on various photoresist-coated substrates—including glass, silicon wafers, and other planar materials. By precisely transferring custom microstructural patterns onto the substrate surface, it provides a flexible, high-precision manufacturing solution for producing diffractive optical components, MEMS devices, and related micro/nano structures.

Parameter Specification
Surface Processing Feature Line Width<200nm
Waveguide Processing Loss<0.5dB/cm
Fiber Grating Processing Reflectivity0.001% - 90%, adjustable
Fiber Grating Side Mode Suppression Ratio>18dB
Fiber Grating Typical 3 dB Bandwidth0.2nm
Fiber Grating Central Wavelength≤0.3nm

Frequently Asked Questions

What is the minimum line width achievable with this system?
The system can achieve a surface processing feature line width of less than 200nm.
What materials are compatible with the FSD laser system?
It is designed for various hard-brittle materials, crystal materials, glass, silicon wafers, and photoresist-coated planar substrates.
What is the positioning accuracy of the X/Y/Z stages?
The X/Y/Z positioning accuracy is highly precise, reaching ≤ 300 nm.
Does the system support 3D internal structure fabrication?
Yes, the system excels in shaping complex 2D and 3D surface or internal structures using advanced vector-path full-speed processing.
What is the warranty period for this equipment?
The equipment comes with a standard 12-month warranty, and after-sale service is provided.
Are there different laser power options available?
Yes, the femtosecond laser average power options include 6W, 10W, and 20W to suit different processing requirements.

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