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Semiconductor flexible circuit board cutting, ITO film layer etching, microelectronic device manufacturing, and biochip preparation.
Drug filtration, biosensors, microfluidic chips, and CC IT positive sample preparation (pore sizes 1-30 μm).
Lithium battery separator microhole processing (pore size ≤ 3 μm) and hydrogen fuel cell microchannel processing.
Precision micro-mold forming, micro-nozzle processing, and microhole filtration components.
| Category | Parameter | Specification (FM-UV3) |
|---|---|---|
| Laser | Wavelength | 355 nm |
| Laser | Power | > 3W @ 40 kHz (3-40W optional) |
| Laser | Modulation Frequency | 1-200 kHz |
| Laser | Beam Quality M² | < 1.3 |
| Galvanometer | Scan Range | < 50*50 mm |
| Galvanometer | Repeatability | < 1 μm |
| Galvanometer | Scan Speed | ≤ 3.5 m/s |
| Z-Axis | Travel | 200 mm |
| Z-Axis | Positioning Accuracy | ≤ ±5 μm |
| CCD Monitoring | Camera Pixels | 5 million |
| Processing | Minimum Pore Size | 5 μm |
| Processing | Max Depth-to-Width Ratio | > 10:1 |
| Power | Power Supply | 220V 50-60Hz 12A |
| Dimensions | Dimensions | 750 * 1100 * 1700 mm |