Compact Laser Micro-Machining System/Efficient Laser Micro-Machining Solutions

Customization: Available
After-sales Service: One Year Warranty
Warranty: One Year Warranty

Product Description

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Basic Info & Logistics

Model NO. AT-61157
Origin China
Package Size 50.00cm * 60.00cm * 50.00cm
Gross Weight 30.000kg
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Product Description

  • Utilizes high-power, high-stability ultraviolet lasers to directly ablate and vaporize materials, achieving a μm-level heat-affected zone and a minimum processing spot size of 5μm.
  • Achieves high-speed, high-precision etching on small surfaces through precise galvanometer control of beam deflection.
  • Enables large-surface precision machining through high-precision linear motor-driven platform translation.
  • The Z-axis is electrically adjustable to accommodate materials of varying thicknesses, meeting the requirements for etching three-dimensional structures.
  • Expands with A and C axes, suitable for machining irregularly shaped parts.
  • High-resolution industrial cameras are used for full-field error correction of the galvanometer and high-precision focusing, ensuring long-term system stability and accuracy.
  • Supports high-precision positioning and machining of workpieces, with built-in offset compensation functionality.
  • The system employs a marble tabletop to enhance overall stability, with all mechanical components carefully selected to ensure long-term precision.
  • Capable of processing metals, ceramics, organics, glass, and other materials, enabling efficient etching, blind hole drilling, through-hole drilling, slotting, and cutting.
  • Minimum processing line width of 5μm, with a customizable processing range of 300*300mm.
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Product Applications

  • Semiconductor flexible circuit board cutting
  • ITO film layer etching
  • Microelectronic device manufacturing
  • Printing template preparation
  • Biochip preparation
  • Precision micro-mold forming
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Capabilities & Services

We focus on technical services, technology development, and consulting across various sectors including computer hardware and auxiliary equipment, functional glass, and new optical materials. Our expertise extends to optical instruments, specialized equipment for semiconductor devices, CNC machine tools, and electronic components. We provide comprehensive solutions for metal cutting, welding equipment, and photovoltaic components, ensuring high-quality industrial standards and innovation.

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Technical Parameters

Category Parameter FM-UVM20A FM-UVM20B
LaserWavelength355nm355nm
LaserPower20W (3~40W optional)20W (3~40W optional)
LaserModulation Frequency1~200kHz1~200kHz
LaserPulse Width15ns@40kHz15ns@40kHz
LaserBeam Quality M²<1.2<1.2
GalvanometerScan Range<50*50mm<15*15mm
GalvanometerRepeatability<1μm<1μm
GalvanometerPositioning Accuracy≤±3μm≤±3μm
XY StageTravel300*300mm (500*400mm optional)300*300mm (500*400mm optional)
XY StagePositioning Resolution0.1μm0.1μm
XY StageRepeatability≤±1μm≤±1μm
XY StagePositioning Accuracy≤±3μm≤±3μm
Z AxisTravel150mm150mm
ProcessingMinimum Spot Size8μm5μm
ProcessingMinimum Through-hole<3μm<3μm
MaterialsProcessing MaterialsGlass, organics, metals, ceramics, etc.Glass, organics, metals, ceramics, etc.
CoolingMethodWater-cooledWater-cooled

*Note: Achieved after preheating for 30 minutes at a constant temperature of (25±0.5ºC).

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Detailed Photos

Frequently Asked Questions

Q1: What is the minimum processing spot size of this UV laser system? A1: The system can achieve a minimum processing spot size of 5μm, allowing for extremely high precision.
Q2: Which materials are suitable for processing with this machine? A2: It is capable of processing a wide range of materials including metals, ceramics, organics, glass, and semiconductor flexible circuit boards.
Q3: Does the system support 3D etching for complex structures? A3: Yes, the Z-axis is electrically adjustable, making it fully capable of meeting requirements for etching three-dimensional structures.
Q4: How does the system maintain long-term stability? A4: The system utilizes a marble tabletop for enhanced stability and high-resolution industrial cameras for continuous error correction and focusing.
Q5: What cooling method does the laser use? A5: The system employs a water-cooled method to ensure consistent performance during high-power operations.
Q6: What is the accuracy of the system processing? A6: The system processing accuracy is ±5μm with a repeatability of ≤±1μm.

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